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Commerce · CHIPS Act

xLight

announced 2025-11-20Private
Stake size
Announced value
$150.0M
Agency
Commerce
Program
CHIPS Act

Commerce invests up to $150M in xLight EUV-lithography startup

The Commerce Department committed up to $150M of CHIPS Act funding to take an equity stake in xLight, a Silicon Valley startup building a domestic EUV lithography light-source alternative to ASML's dominance. The deal targets US semiconductor-equipment independence.

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