Commerce · CHIPS Act

xLight

announced Nov 20, 2025Private

Stake value

$150.0M

Stake %

—

Agency

Commerce

Program

CHIPS Act

Commerce invests up to $150M in xLight EUV-lithography startup

The Commerce Department committed up to $150M of CHIPS Act funding to take an equity stake in xLight, a Silicon Valley startup building a domestic EUV lithography light-source alternative to ASML's dominance. The deal targets US semiconductor-equipment independence.

Source

Public announcement ↗